Search

Surface Technology Systems plc.


Imperial Park
Newport NP10 8UJ
United Kingdom
 Booth: South Hall 1420

Company Overview:

Surface Technology Systems plc (STS), a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd (SPP), is a manufacturer of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, XeF2 and PECVD sources.

STS/SPP operate two manufacturing sites, in the UK and Japan supported by regional sales/service offices & experienced local agents.

Products include the market-leading ASE® deep silicon etch process (also known as Deep Reactive Ion Etch or DRIE) for anisotropic, high aspect ratio MEMS micromachining and TSV etching. STS also offers a range of dielectric etch and deposition processes for optical waveguides, and GaAs, InP and GaN etch processes for LEDs, VCSELs, LASERs and wireless devices.

All STS' process technologies are available on a range of platforms which give a logical upgrade path from R&D and pilot production to volume production, without the need for process re-qualification.

Brand Names:

ASE, Pegasus

This Exhibitor offers products & services in the following categories:

• Equipment
• Equipment Manufacturers
» Wafer Processing Equipment
› Deposition; (CVD, PVD, ALD, Plating)
› Etching/Stripping/Ashing
» Nanotechnology Equipment or Tools
› Equipment, Nanotechnology
» MEMS Equipment
› Deep RIE etching; Dry Etching