Company Overview:
The OEM Group are process integration experts specializing in high quality, cost-effective life cycle management solutions for front-end semiconductor equipment. Products and services include: Exclusive Manufacturer of New and Remanufactured MRC Eclipse (PVD), AGHeatpulse (RTP), Lam Autoetch and Drytek (Etch), and Varian 120XP, 160XP, and 350D (Implant); Remanufacture and revitalization of AMAT Endura (PVD), Centura (CVD, ETCH, RTP, & EPI), P5000 (ETCH, CVD, & PECVD), Mattson Aspen II (ASH & CVD), and Novellus C1 & C2 systems (CVD). OEM Group also provides system upgrades and conversions improving life span, performance, and capabilities to meet the ever-evolving technology and capacity requirements of its customers. OEM Group has collectively completed over 1100 projects and we continue to redefine the way companies purchase, operate, and maintain their capital equipment. We also offer refurbished Dry and Wet Vacuum Pumps, Gas Abatement, Chillers, and Turbo and Cryo Pumps.
Brand Names:
MRC Eclipse Star, Mark II, and Mark IV PVD; AGHeatpulse 8108, and 8800 (RTP); Lam Autoetch 490, 590, and Drytek 384T (Etch), and Varian 120XP, 160XP, and 350D (Implant)
This Exhibitor offers products & services in the following categories:
• Equipment
• Equipment Manufacturers
» Wafer Processing Equipment
› Deposition; (CVD, PVD, ALD, Plating)
› Epitaxy Equipment
› Etching/Stripping/Ashing
› Ion Implantation
› Thermal Processing
» MEMS Equipment
› Deep RIE etching; Dry Etching
• Sub-Systems or Components or Parts
» Sub-systems
› Pumps, Vacuum
› Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
• Manufacturing Services or Consulting (including Those Services or Consulting directly related to Manufacturing)
» Manufacturing Services
› Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
› Used; Rental Equipment; Inventory Reduction, Appraisal - Brokers; Resellers