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GSI Group


125 Middlesex Turnpike
Bedford, MA 01730-1409
United States
 Booth: North Hall 5956

Company Overview:

MicroE Systems manufactures miniature, high-performance encoders for motion control feedback. The Mercury II™ encoder family offers unmatched performance, versatility, ease of use, and robustness. Resolutions range from 5 microns to 1.2 nanometers, linear and up to 268M CPR, rotary. Vacuum models operate at up to 1E-08 torr. Models with all electronics in the sensor, and either digital our analog output, enable the most compact motion systems. Equipment designers seeking performance improvements, cost reductions and smaller motion systems are specifying Mercury II encoders.

MicroE Systems is part of GSI Group, a global technology leader encompassing:
- MicroE Systems’ encoders
- Cambridge Technology & General Scanning optical scanners & scan heads
- ExoTec lightweight beryllium structures
- Westwind air bearings
- CircuitTrim, WaferMark, WaferTrim, and WaferRepair manufacturing equipment
- Quantronix, Continuum, Synrad, JK, Spectron, & Lumonics laser sources

Brand Names:

Mercury, Mercury II, ChipEncoder

This Exhibitor offers products & services in the following categories:

• Equipment Manufacturers
» Wafer Processing Equipment
› Wafer Identification/Marking
» Test Equipment
› Circuit Repair; Design Modification; Redundant Memory Repair; Mask Repair Systems
› Memory Test Systems
• Sub-Systems or Components or Parts
» Sub-systems
› Exposure; Illumination Sources - Laser; Lamp; X-ray and other
› Handling; Transfer; Loading Systems; Lifting devices
› Motion control systems; Servo control systems and Components
› Pneumatic Systems; Pneumatic rotary spindles
» Components, Parts and Accessories
› Bearings; Shaft Collars
› Sensors
› Vacuum Systems Components and Accessories (optical monitors; Sputtering target fixtures; lubricants; pump oils; etc.)