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Device Scaling TechXPOT
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Free Technical Forum
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The demand for higher performance has driven the incorporation of new devices and technologies into semiconductor manufacturing. The new devices require new materials like high k gate and capacitor dielectrics, low k interlayer dielectrics, and engineered substrates. This session will feature presentations by device makers, equipment manufacturers, A government lab and materials suppliers describing these new technologies and how they have been integrated into production
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Tuesday Jul 14, 2009
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10:30 AM - 12:30 PM
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North Hall, Moscone Center